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.498 PSL WaferversusNanospec 8000 Film Thickness Measurement

KLA .498 PSL Wafer, Onto Innovation Nanospec 8000 Film Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMKLAOnto Innovation
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferOnto Innovation Nanospec
Specifications
ConfigurationNIST Traceable[1]not working[2]
NIST traceabilityYes[1]—
OEMKLA[1]—
CategoryMetrology & Inspection[1]—
TraceabilityYes[1]—
DescriptionParticle-sizing calibration standard[1]—
Manufacturer—ONTO / Nanometrics[3]
Model—Nanospec 8000[3]
Equipment type—Film Thickness Measurement[3]
Wafer size—8 inch[2]
Condition—not working[2]
Vintage—1996[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]Equipment inventory listing