Waferpedia

Comparison ledger

.498 PSL WaferversusNT9800

KLA .498 PSL Wafer, Wyko NT9800, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
NT9800Wyko
OEMKLAWyko
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferWyko NT9800
Specifications
ConfigurationNIST Traceable[1]—
NIST traceabilityYes[1]—
OEMKLA[1]—
CategoryMetrology & Inspection[1]METROLOGY[2]
TraceabilityYes[1]—
DescriptionParticle-sizing calibration standard[1]—
Listed tool name—Veeco-Wyko-NT9800[2]
Equipment category in source—Metrology[2]
Tool designation—Veeco-Wyko-NT9800[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]nanousers.mit.edunanousers.mit.edu