Comparison ledger
KLA eDR 5210 DR-SEM, KLA eS 32 E-Beam, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | eS 32 E-BeamKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA eDR | KLA eS 32 E-Beam |
| Specifications | ||
| Configuration | 2 Load Port (Brooks FixLoad)[1] | 12"[3] |
| Wafer size | 12 inch (300 mm)[2] | — |
| Robot & Aligner | Brooks[1] | — |
| TMP | Edward[1] | — |
| Ion pump | Varian[1] | — |
| Vintage | 2010[2] | — |
| Tool type | Defect review scanning electron microscope[1] | — |
| Category | Metrology & Inspection[2] | — |
| Wafer handling | Robot & Aligner (Brooks)[1] | — |
| Vacuum & pumping | TMP (Edward); Ion pump (Varian)[1] | — |
| Equipment type | — | e-beam inspection system[4] |
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