Comparison ledger
KLA P-2, KLA Solid State, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P-2KLA | Solid StateKLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-2 | KLA Solid State |
| Specifications | ||
| Model | P-2[1] | — |
| OEM | KLA Tencor[1] | KLA[4] |
| Equipment type | Profilometer[1] | — |
| Sample table | 200 mm sample table with vacuum[2] | — |
| Measurement range | Measures steps from 100 Å to 300 µm[2] | — |
| Maximum sample thickness | 20 mm[2] | — |
| Minimum sample length | 25 mm[2] | — |
| Feature | 3D scan option[2] | — |
| Wafer size | 200mm[3] | — |
| 3D scan option | Yes[2] | — |
| Configuration | — | Upgrade for KLA AIT II & XP Series Systems[4] |
| Category | — | Metrology & Inspection[4] |
| Family entry | — | KLA Solid State family[6] |
| Model entry | — | KLA Solid State Laser[6] |
| Description | — | solid-state laser upgrade for KLA AIT II and XP series systems[6] |
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