Comparison ledger
KLA P 22 H Surface, KLA P 22 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P 22 SurfaceKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Automated Wafer Handler | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P | KLA P |
| Specifications | ||
| Configuration | Step Height Precision Micro 2D Scanner[1] | UPI Board Only[3] |
| Scan Length | 60 mm[1] | — |
| Scan Speed | 1 um/sec to 25mm/ sec[1] | — |
| Scan Method | Bi-directional moving stylus[1] | — |
| Sampling Rate | 5, 10, 20, 50, 100, 200, 500 , 1000 Hz[1] | — |
| Stylus Force | Adjustable between 0.05 ~ 50mg[1] | — |
| Step Height Repeatability, 1 | 0.75 nm or 0.1%:Sample Handling:[1] | — |
| Theta | 360[1] | — |
| Optics | Dual View Optics[1] | — |
| Stage | Motorized precision 200mm Diameter X-Y vacuum sample stage[1] | — |
| Stylus | 2 um Radius 60[1] | — |
| Operating system | Window based Operation system[1] | — |
| Monitor | LCD Monitor[1] | — |
| Vertical Range / Resolution | +,- 13um/0.0075A +,-65um/0.04A 327um/0.19A[1] | — |
| Step Height Repeatability | 0.75 nm or 0.1%[1] | — |
| Theta rotation | 360[1] | — |
| Maximum sample thickness | 21 mm[1] | — |
| Maximum sample weight | 1 Kg[1] | — |
| Automated Wafer Handler | 1 open loadport for 200mm and 150mm[1] | — |
| Wafer size | Automated Wafer Handler[1] | — |
| Data Screen | display scan, roughness, data summary table listing up to 27 parameters ( total 48 )[1] | — |
| Database Manager | Save & Retrieve data[1] | — |
| ASCII Output | Scan data is exportable to commercial spreadsheet programs[1] | — |
| Data Output | Data Screen (display scan, roughness, data summary table listing up to 27 parameters total 48), Database Manager, ASCII Output[1] | — |
| Equipment type | Surface profilometer[1] | surface profilometer[3] |
| Performance | Step Height Precision Micro 2D Scanner[2] | — |
| Data output | Data Screen, Database Manager, ASCII Output[1] | — |
| Manufacturer | — | KLA[3] |
| Model | — | P 22 Surface[4] |
| Category | — | Metrology & Inspection[3] |
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