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SEZ DV Primeversus11600 SRD

Lam Research SEZ DV Prime, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
SEZ DV PrimeLam Research
11600 SRDSemitool
OEMLam ResearchSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research SEZSemitool 11600 SRD
Cited variants
  • Lam / SEZ DV Prime Wet Station, 12"[1]
—
Specifications
ConfigurationChambers (8)[2]Ceramic[3]
Make / OEMLam / SEZ[2]—
ModelDV Prime[2]11600 SRD[3]
Equipment typeWet station[2]Spin Rinse Dryer[3]
Wafer size12 inch[2]—
Chambers8[2]—
Manufacturer—Semitool[3]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]inventory listing