Comparison ledger
Lam Research TCP9400DFM, Nikon S-210, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | TCP9400DFMLam Research | S-210Nikon |
|---|---|---|
| OEM | Lam Research | Nikon |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research TCP9400DFM | Nikon S-210 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Equipment[3] |
| Dry | Poly Etcher[1] | — |
| Manufacturer | Lam Research (listed as LAM / Lam)[2] | Nikon[3] |
| Model / Part No. | TCP9400DFM[1] | — |
| Equipment type | Dry poly etcher[1] | — |
| Process | Poly etch[2] | — |
| Power | — | 200VAC 50/60Hz 3 Phase[3] |
| Model | — | S-210[3] |
| Condition | — | Used[3] |
| Year(s) | — | 2014[3] |
| Quantity | — | 1[3] |
| Location | — | EUROPE (Western and Northern)[3] |
| Status note | — | Still in the fab running wafers[3] |