Waferpedia

Comparison ledger

700versus100R16

Lapmaster 700, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
700Lapmaster
100R16Strasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 700Strasbaugh 100R16
Specifications
Machine typeAir Bearing Optical Polishing Machine[1]—
Configurationring lap, planetary configuration[1]—
Form factorprecision floorstanding machine[1]—
Intended applicationpolishing of high precision plano optics[1]—
Supported materialsglass, glass ceramic, or crystalline material[1]—
Optical polishing pitch plate diameter700 mm (27.5 in)[1]—
Workholder rings2 + 1 aluminum glass-faced workholder rings, each with an internal diameter of 224 mm (8.8 in)[1]—
Drive to support plateflat multi "V" belt running around the outside edge of the support plate[1]—
Main drive motortotally enclosed, fan cooled, 1.5 kW motor mounted on rails to allow belt adjustment[1]—
Electrical service460 volts, 60 Hz, 3 phase[1]—
Machine TypeAir Bearing Optical Polishing Machine (ring lapper / planetary configuration)[1]—
Support Plate Diameter700 mm (27.5 in)[1]—
Workholder Rings (Quantity & Internal Diameter)3 aluminum glass-faced rings, each 224 mm (8.8 in) internal diameter[1]—
Drive TypeFlat multi-V belt running around outside edge of support plate[1]—
Main Drive Motor Power1.5 kW[1]—
Electrical Service460 V, 60 Hz, 3 phase[1]—
type—1 spindle grinder/polisher[2]
drive system—DC drive system with 2 motors[2]
spindle RPM—1-180 RPM[2]
eccentric RPM—1-90 RPM[2]
controls—digital timer; air down switch; spindle and eccentric speed dials; air regulators[2]
capacity—16 inches[2]
spindle size—1-8 TPI[2]
overall dimensions—28 inches x 36 inches x 48 inches[2]
weight—500 lbs[2]
origin—made in the USA[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]excelltechnology.comexcelltechnology.com