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Comparison ledger

EDC-650-23 BversusEDC-650-23B

Laurell EDC-650-23 B, Laurell EDC-650-23B, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMLaurellLaurell
CategoryResist ProcessingResist Processing
Wafer size150mm150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLaurell EDC-650-23 BLaurell EDC-650-23B
Cited variants—
Specifications
OEMLaurell[2]—
ModelEDC-650-23 B[2]EDC-650-23B[1]
TypeEDC System[2]EDC System[1]
Controller650-series[2]—
Max. Substrate Sizeø 150mm (5" × 5")[2]—
Max. RPM12000 rpm[2]—
Mounting OptionsTabletop, In-Deck, On-deck[2]Tabletop, In-Deck, On-Deck[1]
Controller Series—650 Series[1]
Max Substrate Size—Ø150mm (5" × 5")[1]
Max RPM—12,000 rpm[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]laurell.comlaurell.com
  2. [2]images.laurell.comimages.laurell.com