Waferpedia

Comparison ledger

Boxer 700 ARversusBoxer Pro

Leybold Boxer 700 AR, Leybold Boxer Pro, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Boxer ProLeybold
OEMLeyboldLeybold
Category—Lab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLeybold BoxerLeybold Boxer
Specifications
ConfigurationRefurbished[1]HPE 6 Eelectron Gun[3]
OEMLeybold[1]—
ModelBoxer 700[1]—
Described asRefurbished[1]—
Configured withTurbo Pump, Gun, Ion & Thermal Source, 2 Way Crystal Head, Polycold[1]—
Lens capacity per cycle60[1]—
Vintage2008[1]—
MakeLeybold[1]—
ConditionRefurbished[1]—
Turbo pumpIncluded[1]—
GunIncluded[1]—
Ion & thermal sourceIncluded[1]—
2-way crystal headIncluded[1]—
PolycoldIncluded[1]—
Substrate holder configuration—3 Segments on a calotte with 65, 70, 75, 80 mm rings sizes[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing