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Comparison ledger

05 LHP 151versusPTI 250

Melles Griot 05 LHP 151, Zygo PTI 250, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
05 LHP 151Melles Griot
OEMMelles GriotZygo
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyMelles Griot 05Zygo PTI 250
Cited variants—
Specifications
ConfigurationWith 05 LPL 340 Power Supply (Does not power on)[2]—
Equipment typeLaser[2]—
MakeMelles Griot[2]—
Model05 LHP 151[2]—
Power stateDoes not power on[2]—
Instrument type—Compact Fizeau phase-measuring interferometer[1]
Test source—Class I 655 nm semiconductor laser[1]
Test beam diameter—25 mm[1]
CCD resolution—640 x 480 pixels[1]
Focus range—±250 mm manual[1]
Software—Zygo PTI 250 software on Microsoft Windows XP Professional[1]
Power supply—100-240 VAC, 50/60 Hz[1]
Dimensions (H x W x D)—686 x 203 x 356 mm[1]
Weight—33 kg[1]
Measurement uncertainty (flat)—λ/20[1]
Measurement uncertainty (spherical RMS)—λ/10 RMS[1]
Repeatability (1σ RMS)—λ/2000[1]
Accuracy (1σ)—λ/500[1]
Operating temperature—15°C to 35°C[1]
Temperature variation—<1.0°C / 15 min[1]
Humidity—10% to 95% non-condensing[1]
Vibration isolation requirement—None (no special vibration isolation)[1]
Languages—English, German, Japanese, Simplified Chinese, Traditional Chinese[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]shdooz.comshdooz.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com