Comparison ledger
MKS FI 20160, MKS FI 20160 1 Microwave, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FI 20160MKS | |
|---|---|---|
| OEM | MKS | MKS |
| Category | — | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | MKS FI 20160 | MKS FI 20160 |
| Specifications | ||
| Power | 3.0 KW[1] | 3.0 kW[3] |
| Configuration | for AMAT P 5200[1] | 20 A[3] |
| Type | generator[1] | — |
| Condition | repaired[1] | — |
| Phase | — | SmartPower series - 3.0 kW - Liquid-cooled - 200–208 VAC, 3-phase - Remote / DeviceNet control[3] |
| Voltage | — | 208 V[3] |
| Cooling | — | Liquid-cooled[3] |
| Current | — | 20 A[3] |
| Frequency | — | 50/60 Hz[3] |
| Control | — | Remote / DeviceNet[3] |