Comparison ledger
Newport SMC 100 Series Motion Controller Driver, Nikon 1505 G 6 E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1505 G 6 ENikon | |
|---|---|---|
| OEM | Newport | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1988– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Newport SMC 100 Series Motion Controller Driver | Nikon 1505 |
| Cited variants | — | |
| Specifications | ||
| Command Set | 40+ intuitive, 2-letter ASCII commands[1] | — |
| Computer Interfaces | RS-232-C; USB compatible with external SMC-USB adapter[1] | — |
| Control Algorithm | Floating point digital PID loop with velocity and friction feed forward, 2kHz servo rate; backlash and hysteresis compensation[1] | — |
| Drive Type | DC servo motors in open or closed loop (CC model); Open-loop stepper motors control (PP model)[1] | — |
| ESP Compatibility | ESP Stage Detection[1] | — |
| Motion | Point-to-point motion with s-gamma motion profiler allowing acceleration and jerk time control[1] | — |
| Motor Control | CC model: 48 VDC @ 1.5 A rms, 3 A peak; PP model: 48 VDC @ 1.1 A rms per phase; 100 kHz PWM switching frequency[1] | — |
| Number of Axis | 1[1] | — |
| Interface | Two-color LED[1] | — |
| Dimensions | 33 H x 161 W x 140 D (mm)[1] | — |
| I/O | 4 TTL out; 4 TTL in; 1 analog input[1] | — |
| Software | Windows Utility program; LabVIEW drivers[1] | — |
| Features | Daisy-chain up to 31 Controllers[1] | — |
| Type | Single-axis motion controller/driver for DC or stepper motor[2] | — |
| Communication interfaces | RS232, USB (via RS232C to USB converter), RS485[2] | — |
| Max controllers in daisy chain | 31[2] | — |
| Power supply input | 100-240 VAC[2] | — |
| Configuration | — | 5" reticle[3] |
| Resolution | — | 650 nm[4] |
| Numerical Aperture | — | 0.54[4] |
| Reduction | — | 5x[4] |
| Exposure Field | — | 15 x 15 mm[4] |
| Alignment Accuracy | — | 130 nm[4] |
| Wafer Size | — | 4 inch[3] |
| Light Source | — | g-line[5] |
| Introduction Year | — | 1988[4] |
| NA (Numerical Aperture) | — | 0.54[4] |
| Make | — | Nikon[3] |
| Model | — | 1505 G 6 E[3] |
| Category | — | Stepper[3] |
| Wafer Sizes | — | 4 inch[3] |
| Exposure type | — | g-line[4] |
| NA | — | 0.54[4] |
| Exposure field | — | 9.3 x 18.8 mm[4] |
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