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276768versusNRM 3100 SP+ Overlay Measurement

Nikon 276768, Nikon NRM 3100 SP+ Overlay Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
276768Nikon
NRM 3100 SP+ Overlay MeasurementNikon
OEMNikonNikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyNikon 276768Nikon NRM 3100 SP+ Overlay Measurement
Specifications
Configurationwith x/y/z positional and tracking stage[1]50/60 Hz[2]
Phase—1 Phase[2]
Category—Metrology & Inspection[3]
Power—50/60 Hz[2]
Compressor—Ulvac C 30 VRT Compressor[2]
276768 entryNRM 3100 SP+ Overlay Measurement entryAsk about these tools →Share experience with this comparison →

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com