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Comparison ledger

MetaPULSE G MeasurementversusMetaPulse Inspection, Measurement

Onto Innovation MetaPULSE G Measurement, Onto Innovation MetaPulse Inspection, Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMOnto InnovationOnto Innovation
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyOnto Innovation MetaPulseOnto Innovation MetaPulse
Cited variants
  • MetaPULSE G with 3-Wide EFEM[1]
  • MetaPULSE G with 2-Wide EFEM[1]
  • MetaPULSE G with SWS[1]
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Specifications
ConfigurationOpaque Thin Film[2]50/60 Hz[4]
Wafer Size6 inch[2]—
OEMONTO / Rudolph[3]—
ModelMetaPULSE G Measurement[3]—
Wafer sizes6 inch[2]—
Product descriptionOpaque Thin Film[2]—
CategoryMetrology & Inspection[3]—
Phase—2 Phase[4]
Voltage—220 vac[4]
Function—inspection and measurement tool for semiconductor manufacturing[5]
Frequency—50/60 Hz[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]scribd.comscribd.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com