Comparison ledger
Semitool 003163-000 SRD, Veeco M 3307, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 003163-000 SRDSemitool | M 3307Veeco |
|---|---|---|
| OEM | Semitool | Veeco |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 003163-000 SRD | Veeco M 3307 |
| Specifications | ||
| Make | Semitool[1] | — |
| Model | 003163-000[1] | M 3307[2] |
| Equipment type | Spin Rinse Dryer (SRD)[1] | — |
| Asset # | 139375[1] | — |
| Last Confirm Date | September 03, 2025[1] | — |
| Load Port Model | — | TDK TAS 300[2] |
| Chemical Chamber | — | Many Missing Parts[2] |
| Process Type | — | Flux Clean[2] |
| OEM | — | Veeco / SSEC[2] |
| Category | — | Wet Processing / Clean[3] |
| Tool type | — | Coater / Developer[2] |
| Wafer size | — | 12 inch[2] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →