Comparison ledger
Thermo Fisher 1300 Series Safety, Tokyo Electron Expedius, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1300 Series SafetyThermo Fisher | ExpediusTokyo Electron |
|---|---|---|
| OEM | Thermo Fisher | Tokyo Electron |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2026 Third-party support only | — |
| Control system | — | — |
| Generation | — | — |
| Family | Thermo Fisher 1300 | Tokyo Electron Expedius |
| Specifications | ||
| Configuration | Class II[1] | single block[4] |
| Cabinet type | Class II, Type A2 biological safety cabinet[2] | — |
| Airflow compensation | SmartFlow airflow compensation system[2] | — |
| Motors | Dual DC motors[2] | — |
| Front window design | SmartClean front window design[2] | — |
| Control panel | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[2] | — |
| UV light | Programmable UV light[2] | — |
| SmartPort | SmartPort convenience for routing tubing and cables through the side walls[2] | — |
| Available widths | 3-foot, 4-foot, 5-foot, and 6-foot sizes[2] | — |
| Front opening choices | 8-inch or 10-inch front opening[2] | — |
| Filter specification | H14 HEPA filters, EN 1822, 99.995% @ MPPS[3] | — |
| Certification | NSF/ANSI 49, UL, CE[3] | — |
| Service valves | Up to 6 total, 3 on each side wall[3] | — |
| Wafer size capability | — | 5 to 8 inches[5] |
| Platform | — | CLEAN TRACK MARK 7[5] |
| Cleaning capability | — | Both sides of wafer[5] |
| Transfer system | — | Vacuumless robotic transport[5] |
| Chuck type | — | Mechanical and vacuum chucks[5] |
| Brush pressure control | — | Automatic brush pressure controller[5] |
| Optional cleaning modules | — | High-pressure jet spray or megasonic clean[5] |
| Host communication | — | GEM host communication[5] |
| Interface | — | SMIF interface[5] |
| Compliance | — | S2-93 and CE mark[5] |
| OEM | — | Tokyo Electron[4] |
| Model | — | Expedius[4] |
| Equipment type | — | Wet Bench[4] |
| Wafer capability | — | 5 inch to 8 inch[5] |
| Wafer transfer | — | non-vacuum wafer transfer capability[5] |
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