Comparison ledger
Ulvac CRYO U 10 HL Cryopump, Ulvac CRYO U 8 HL Cryopump, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | CRYO U 8 HL CryopumpUlvac | |
|---|---|---|
| OEM | Ulvac | Ulvac |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Ulvac CRYO | Ulvac CRYO |
| Specifications | ||
| Configuration | 240L/S[1] | 9.5" OD[3] |
| Manufacturer | Ulvac[1] | — |
| Model | CRYO U 10 HL[1] | — |
| Type | Cryopump[2] | Cryopump[4] |
| Pumping speed | 240 L/S[1] | — |
| Flange | 11.5" OD ISO-K Flange[1] | — |
| Outside diameter | — | 9.5" OD[3] |
| Inside diameter flange | — | 8.375" ID ISO flange[3] |
| Pumping speeds at 20 degrees | — | Nitrogen 1,500 L/s; Hydrogen 2,200 L/s; Argon 1,200 L/s; Water 4,000 L/s[5] |
| Ultimate pressure | — | 10^-7 Pa (10^-9 Torr)[5] |
| Maximum throughput | — | Argon 1.2×10^3 Pa·L/s (8.9 Torr·L/s)[5] |
| Pumping capacity | — | Argon 1.6×10^8 Pa·L (1.2×10^6 Torr·L); Hydrogen 1.2×10^6 Pa·L (9.0×10^3 Torr·L)[5] |
| Cooldown time | — | 110/100 min (50/60 Hz)[5] |
| Mounting flange | — | UVG-200[5] |
| Compressor unit compatibility | — | C10, C10AT, C10ES[5] |
| Weight | — | 20 kg[5] |
| Maintenance interval | — | Every 16,000 hours[5] |