Comparison ledger
Varian 0332 F 9453 302 Diffusion, Vitronics Soltec XPM 3 i 820, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Soltec XPM 3 i 820Vitronics | |
|---|---|---|
| OEM | Varian | Vitronics |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 0332 F 9453 302 Diffusion | Vitronics Soltec XPM |
| Specifications | ||
| Asset Number | 142841[1] | — |
| Last Confirm Date | October 14, 2025[2] | — |
| Make | Varian[1] | — |
| Model | 0332 F 9453 302[1] | — |
| Category | Thermal / Diffusion[3] | — |
| Tool type | diffusion pump[3] | — |
| Power | — | 58 kWA[4] |
| Cycles | — | 50/60 Hz[4] |
| Full Load | — | 70 A[4] |
| Largest load | — | 12 A[4] |
| Voltage | — | 3X480 V[4] |
| Equipment type | — | Reflow oven[4] |
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