Comparison ledger
Varian 160 XP, Varian E 500 EHP Ion Implant, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 160 XPVarian | E 500 EHP Ion ImplantVarian |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 160 XP | Varian E 500 EHP Ion Implant |
| Cited variants |
| — |
| Specifications | ||
| Configuration (160 XP Ion variant) | 150mm High Current IMP[1] | — |
| Phase | — | 208 Volts, 3 Phase[2] |
| Configuration | — | 50/60Hz, 5 Wire[2] |
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