Comparison ledger
Veeco TurboDisc K 465 GaN MOCVD, Veeco TurboDisc K 465 MOCVD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | Veeco | Veeco |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Veeco TurboDisc K 465 | Veeco TurboDisc K 465 |
| Specifications | ||
| Configuration | K465 GaN Turbo disk[1] | K465 GaN Turbo disk[2] |
| Phase | 3 Phase[1] | 3 Phase, - 5 Wire[2] |
| Voltage | 400 Vac, 280 A, 50/60 Hz[1] | 400 Vac, 280 A, 50/60 Hz[2] |
| Make | Veeco[1] | — |
| Model | TurboDisc K 465[1] | TurboDisc K 465[3] |
| Equipment type | GaN MOCVD (Metal Organic Chemical Vapor Deposition)[1] | MOCVD (Metal Organic Chemical Vapor Deposition)[3] |
| Alternative designation | TurboDisc K465 GaN Turbo disk[1] | — |
| Electrical requirements | 3 Phase, 5 Wire, 400 Vac, 280 A, 50/60 Hz[1] | — |
| Vintage | 2009[1] | — |
| Manufacturer | — | Veeco[3] |
| Category | — | Deposition[2] |
| Power | — | 3 phase, 5 wire[3] |
| Electrical rating | — | 400 Vac, 280 A, 50/60 Hz[3] |
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