Comparison ledger
ABM -407B-1-S-CES293 Robot, KLA Aleris 8350 Film Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | KLA Aleris 8350 Film Thickness Measurement |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | Aleris 8350[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Make | — | KLA[2] |
| Wafer sizes | — | 12 inch[2] |
| Asset ID | — | 227861[3] |
| Currently configured for | — | 300mm[3] |
| Current equipment status | — | Available[3] |
| Input voltage | — | 208VAC/230VAC[3] |
| Communications | — | Full Automation (E40, E84, E87, E90, E94)[3] |
| Measurement capabilities | — | Film thickness, film reflectivity, index of refraction (N or RI)[3] |
| Wafer size | — | 12 inch[2] |
| Configured for | — | 300mm[3] |
| System hardware | — | 17" color monitor; P4 Computer / Windows XP; CD-Rom Drive[3] |
| Power | — | AC Power Supply (Input Voltage: 208VAC/230VAC)[3] |
| FOUP loadports | — | Sinfonia Selop6 Serires[3] |
| Dual loadport wafer handler | — | Yaskawa handling system[3] |