KLA
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The KLA Aleris 8350 is a film thickness measurement system. The KLA Aleris 8350 is configured for 12-inch wafers. The KLA Aleris 8350 includes multiple films measurement capabilities.[1][2]
The KLA-Tencor Aleris 8350 has FOUP loadports, a dual loadport wafer handler, an operator console with monitor, a computer, and an AC power supply. The KLA-Tencor Aleris 8350 has a tester with multiple films measurement capabilities, including film thickness, film reflectivity, and index of refraction. The KLA-Tencor Aleris 8350 includes a stage for 300 mm wafers. The KLA-Tencor Aleris 8350 includes a pattern recognition system for monitor wafer alignment, site by site alignment, and each measurement subsystem. The KLA-Tencor Aleris 8350 includes temperature control. The KLA-Tencor Aleris 8350 has measurement capabilities that include 190 to 900 nm BBSE, 1D stress, and trend charts. The KLA-Tencor Aleris 8350 has full automation communications with E40, E84, E87, E90, and E94.[2]
The KLA-Tencor Aleris 8350 measures film thickness, film reflectivity, and index of refraction. The KLA-Tencor Aleris 8350 also supports 1D stress measurement.[2]
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The KLA Aleris 8350 is a film thickness measurement system.[1][3][2]
The KLA-Tencor Aleris 8350 measures film thickness, film reflectivity, and index of refraction. The KLA-Tencor Aleris 8350 also includes 1D stress in its measurement capabilities.[2]
The following facts about the Aleris 8350 Film Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Aleris 8350 Film Thickness Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Aleris 8350 Film Thickness Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Aleris 8350 Film Thickness Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Aleris 8350 Film Thickness Measurement are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Aleris 8350 Film Thickness Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 16, 2026.
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