Comparison ledger
ABM -407B-1-S-CES293 Robot, YES 199, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 199YES | |
|---|---|---|
| OEM | ABM | YES |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | YES 199 |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Document topic | — | Processing procedures for BCB adhesion[2] |
| Material family | — | Cyclotene Advanced Electronic Resins / benzocyclobutene (BCB)[2] |
| Adhesion promoters discussed | — | AP3000 and AP8000[2] |
| Recommended adhesion promoters | — | AP3000 and AP8000 are the only adhesion promoters recommended for use with BCB[2] |
| Recommended pre-clean | — | O2 plasma, with or without water rinse[2] |
| Preferred plasma tool type | — | RIE-type plasma tools[2] |
| Adhesion test methods | — | Tape peel, modified edge lift-off (m-ELT), and bump shear[2] |
| Tape peel standard | — | ASTM D-3359-93[2] |
| Pressure cooker test conditions | — | 121°C, 2 atmospheres pressure, 100% relative humidity[2] |
| Thickness example | — | BCB bump shear squares are typically 100 μm x 100 μm[2] |