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W-GM-4200 Wafer EdgeversusDAD3221

Accretech W-GM-4200 Wafer Edge, Disco DAD3221, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
DAD3221Disco
OEMAccretechDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size150mm150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAccretech W-GM-4200 Wafer EdgeDisco DAD3221
Specifications
VoltageAC200V +-5% 3ø[1]—
Power Consumption5.0 KVA[2]—
Main Air Source0,56Mpa[2]—
Spindle Air Source0,56Mpa[2]—
Grinding and Cleanig Water15L/min, 0.3Mpa, 18°C recommended[2]—
Mist Exhaust5m3/min[2]—
Wafer size150mm, 200mm[2]100, 150 mm wafers[4]
Wafer Thickness0,4-1,0mm[2]—
Wafer typeWafer with OF or notch[2]—
Notch Angle89deg – 95deg[2]—
Notch Angle Setting Value0,001deg step[2]—
Grinding UnitLeft/Right[2]—
Grinding wheelFor Periphery and for Notch[2]—
Periphery Grinding wheel speed2500m/min (wheel 200mm, at 4000rpm)[2]—
ConfigurationRotational Frequency of Spindle for Notch: 70000-94000rpm[2]—
Driving System for Peripheral GrindingBuilt-in by inverter motor[2]—
Driving System for Notch GrindingAir bearing system[2]—
MakeAccretech / TSK[3]—
ModelW-GM-4200[3]—
Wafer Sizes6 inch[3]—
Rotational Frequency of Spindle for Notch70000-94000rpm[2]—
4 cassette loading stagesfor wafer size of 6” and 8”[2]—
Type—automatic dicing saw[4]
Setup—non-contact setup[4]
Blade monitoring—blade breakage detector[4]
Cutting functions—circle cut for edge trimming or down sizing[4]
Particle/ESD mitigation—CO2 injector to prevent particle adhesion and electrostatic discharge damage[4]
Alignment aids—pattern recognition system; automatic micro-alignment[4]
Equipment type—Automatic dicing saw[4]
Wafer / substrate size—100, 150 mm wafers[4]
Substrate size—up to 150mm diameter[5]
Max. workpiece size—Φ6 inch (150 mm × 150mm user-specified specification)[6]
Non-contact setup—Yes[4]
Blade breakage detector—Yes[4]
Circle cut—For edge trimming or downsizing[4]
CO2 injector—Prevents particle adhesion and electrostatic discharge damage[4]
Pattern recognition system—Yes[4]
Automatic micro-alignment—Yes[4]
Spindle layout—Single[6]
Standard rated output—2.0 kW at 40,000 min-1[6]
Optional rated output—1.8 kW at 60,000 min-1[6]
Equipment dimensions—490 × 870 × 1,670 mm[6]
Equipment weight—Approx. 420 kg[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]epfl.chepfl.ch
  5. [5]epfl.chepfl.ch
  6. [6]disco.com.sgdisco.com.sg