Waferpedia

Comparison ledger

7100 Dicingversus321

ADT 7100 Dicing, Disco 321, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
321Disco
OEMADTDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyADT 7100Disco 321
Specifications
ConfigurationUPS for the machine[1]—
Tool manufacturerAdvanced Dicing Technologies (ADT)[2]—
Tool model7122 NEMO[2]—
Spindle2-inch, DC-brushless, 1.2 kW, front-mounted, air-bearing spindle[2]—
Maximum spindle speed60 krpm max.[2]—
TurntableClosed-loop turntable[2]—
Maximum product sizeUp to 200 mm x 200 mm[2]—
Maximum substrate size8 inch[3]—
OEM—Disco[4]
Model—321[4]
Equipment type—Wafer Dicing Saw[4]
Facility context—Cleanroom Instrumentation[4]
Application area—Nano and Micro Fabrication[4]
Location—FNT 4.106[4]
Wafer Size—Up to 6 inches[5]
Spindle Power—1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[6]
Spindle Power (alternate)—1500 Watt spindle[5]
Non-Contact Setup—Non Contact Setup[6]
Microscope—Microscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[6]
Broken Blade Detection—Broken Blade Detection[6]
Light Tower—Includes Light Tower[6]
Chuck Type—6" Universal Chuck (or 6" Porous Film Frame Chuck)[5]
Wafer size capability—Up to 6" wafers[6]
Chuck—6-inch porous film frame chuck[5]
Spindle power—1500-watt spindle[5]
Footprint—Small footprint[5]
Setup—Non-contact setup[6]
Blade break detection—Broken blade detection[6]
Other features—Floppy drive, light tower, blade tools, manuals[6]

Plan your fab

Building a Dicing & Grinding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]wiki.nano.upenn.eduwiki.nano.upenn.edu
  3. [3]nnci.netnnci.net
  4. [4]tmi.utexas.edutmi.utexas.edu
  5. [5]jmind.comjmind.com
  6. [6]gtsaz.comgtsaz.com