Comparison ledger
Agilent 11980 A, Zygo MicroLUPI, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11980 AAgilent | MicroLUPIZygo |
|---|---|---|
| OEM | Agilent | Zygo |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent 11980 A | Zygo MicroLUPI |
| Cited variants | — | |
| Specifications | ||
| Wavelength Range | 1250-1600 nm[2] | — |
| Laser | — | Type: frequency stabilized Helium-Neon laser with fiber[3] |
| Configuration | — | optic output[3] |
| Wavelength | — | 1550 nanometers[3] |
| Maximum Output Power | — | <1 milliwatt[3] |
| Output Power at Instrument Aperture | — | ≤1 milliwatt[3] |
| Test Beam Diameter | — | 3 mm[3] |
| Coherence Length | — | ≥10 meters[3] |
| Mounting | — | Dovetail[3] |
| Type | — | Infinity Corrected SLWD Mag. N.A. Working Dist.[3] |
| Motor | — | DC brushless, microstepper[3] |
| Drive | — | leadscrew[3] |
| Range | — | 6 in. (152 mm)[3] |
| Resolution | — | 4 μin. (0.1 μm)[3] |
| Maximum Velocity | — | 0.50 in/sec (12.7 mm/sec)[3] |
| Laser type | — | frequency stabilized Helium-Neon laser with fiber optic output[3] |
| Maximum output power | — | <1 milliwatt[3] |
| Objective mounting | — | Dovetail[3] |
| Objective type | — | Infinity Corrected SLWD Mag. N.A. Working Dist.[3] |
| Objective 50X | — | 0.45 NA(1), 13.80 mm working distance[3] |
| Objective 100X | — | 0.73 NA, 4.70 mm working distance[3] |
| Useable NA note | — | 0.38 NA useable[3] |
| Z-drive motor | — | DC brushless, microstepper[3] |
| Z-drive drive type | — | leadscrew[3] |
| Z-drive range | — | 6 in. (152 mm)[3] |
| Z-drive resolution | — | 4 μin. (0.1 μm)[3] |
| X/Y stage motor | — | DC brushless, microstepper[3] |
| X/Y stage drive type | — | leadscrew[3] |
| X/Y stage range | — | 6 in. (152 mm)[3] |
| X/Y stage resolution | — | 4 μin. (0.1 μm)[3] |
| Camera size | — | 640 x 480 pixels maximum[3] |
| Viewing | — | 9 in. monochrome video monitor and MetroPro on-screen display[3] |
| Focus | — | manual or automatic[3] |
| Measurement technique | — | phase-shifting interferometry[4] |
| Weight | — | 170 lb (77 kg)[4] |
| Test part type | — | nominally spherical surfaces and flat surfaces[3] |
| Radius of curvature measurement range | — | from 100 μm to 3 mm[3] |
| Reflectivity | — | 4 to 100 %[3] |
| Electrical requirement | — | 90 – 250 VAC, 50/60 Hz[3] |
| DC supply | — | +12 VDC from Zygo Controller Board installed in the computer[3] |
| Compressed air requirement | — | 60 psi minimum, with 1/4 in. input[3] |
| Operating temperature | — | 15° to 30°C (59° to 86° F)[3] |
| Rate of temperature change | — | <1.0°C/15 min.[3] |
| Operating humidity | — | 5 to 95% relative, noncondensing[3] |
| Vibration | — | Frequency Isolation 1Hz < freq < 120Hz[3] |
| Measurement area diameter | — | 50 μm to 3 mm[1] |
| Radius of curvature range | — | 0.1 – 15 mm[1] |
| Accuracy at 633 nm, surface | — | ≤ 1/10 wave (0.063 μm) peak-to-valley; ≤ 1/100 wave (0.0063 μm) rms[1] |
| Accuracy at 633 nm, radius of curvature | — | ≤ 0.0015 mm[1] |
| Repeatability at 633 nm, surface | — | ≤ 1/1000 wave (0.00063 μm) peak-to-valley; ≤ 1/10,000 wave (0.000063 μm) rms[1] |
| Repeatability at 633 nm, radius of curvature | — | ≤ 0.0001 mm (1σ)[1] |
| Measurement time, surface deviation | — | ∼ 5 seconds (typical)[1] |
| Measurement time, radius of curvature | — | ∼ 10 seconds (typical)[1] |
| Spatial sampling | — | Selectable resolution; 640 x 480 pixels, or 320 x 240 pixels[1] |
| System standard models | — | RS-633 and RSx-633[1] |
| Optical configuration | — | Phase-shifting Twyman-Green Interferometer; reflected (standard) or transmitted configurations available[1] |
| Imaging optics | — | Standard interchangeable objectives and test-leg modules; 100X @ 0.73 NA; 50X @ 0.45 NA; 10X @ 0.13 NA[1] |
| Sample positioning | — | Motorized; joystick-controlled or fully programmable for automated operation (including auto-null)[1] |
| Software and computer | — | Dell Pentium III; Microsoft Windows NT operating system; 19-inch SVGA monitor; Zygo MetroPro 3D metrology and analysis software[1] |
| Standard laser | — | Fiber-coupled frequency stabilized HeNe laser, @633 nm wavelength[1] |
| Radius of Curvature | — | from 100 μm to 3 mm[3] |
| Electrical | — | 90 – 250 VAC, 50/60 Hz (for laser power supply, motor[3] |
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