Zygo
MicroLUPI
The Zygo MicroLUPI is a micro-aperture laser unequal path interferometer. The Zygo MicroLUPI is designed for non-contact, high-speed automated measurement of micro-optics. The Zygo MicroLUPI uses a 3 mm diameter collimated measurement beam.[1][2][3]
What it is
General reference — not yet source-verifiedAn interferometer compares a test wavefront with a reference wavefront to evaluate surface form or optical path differences. Precision optical interferometers are used in metrology flows where noncontact measurement is needed for small or delicate parts. Micro-optic metrology tools are typically used to characterize lenses, mirrors, and other formed optical surfaces after fabrication steps and before assembly or final quality release.
How it works
The Zygo MicroLUPI uses phase-shifting interferometry as its measurement technique. The Zygo MicroLUPI has a frequency stabilized Helium-Neon laser with fiber optic output. The Zygo MicroLUPI has a test beam diameter of 3 mm and a coherence length of at least 10 meters. The Zygo MicroLUPI uses dovetail-mounted infinity-corrected SLWD objectives, including 50X and 100X options. The Zygo MicroLUPI has motorized Z-drive and X/Y stages driven by DC brushless microstepper motors and leadscrews. The Zygo MicroLUPI provides sample viewing with a camera of up to 640 x 480 pixels and a monochrome video monitor with MetroPro on-screen display. The Zygo MicroLUPI supports manual or automatic focus.[1][4]
Where it fits in the process flow
General reference — not yet source-verifiedMicro-optic interferometric metrology is generally placed after shaping, molding, polishing, reflow, etch, or replication steps that create the optical surface of a part. Micro-optic interferometric metrology is also used before packaging or system integration so surface form problems can be detected before downstream assembly. In production environments, such tools often provide feedback to process control for optical surface fabrication and array uniformity.
Applications
General reference — not yet source-verifiedMicro-optic metrology systems are used wherever small optical surfaces need quantitative form measurement without contact. Typical uses include process development, in-line or near-line quality control, and characterization of parts whose optical performance depends strongly on surface shape and smoothness. Array-capable optical metrology is especially useful when many repeated features must be checked for uniformity across a substrate or carrier.
What do the numbers mean?
Power & electrical2
Vacuum & pumping1
Optics & imaging22
- optic output[1]
- Objectives:[1]
- Accuracy at 633 nm, surface
- ≤ 1/10 wave (0.063 μm) peak-to-valley; ≤ 1/100 wave (0.0063 μm) rms[3]
- Repeatability at 633 nm, surface
- ≤ 1/1000 wave (0.00063 μm) peak-to-valley; ≤ 1/10,000 wave (0.000063 μm) rms[3]
- Optical configuration
- Phase-shifting Twyman-Green Interferometer; reflected (standard) or transmitted configurations available[3]
- Imaging optics
- Standard interchangeable objectives and test-leg modules; 100X @ 0.73 NA; 50X @ 0.45 NA; 10X @ 0.13 NA[3]
Control & software2
- Software and computer
- Dell Pentium III; Microsoft Windows NT operating system; 19-inch SVGA monitor; Zygo MetroPro 3D metrology and analysis software[3]
Dimensions & facilities1
Configuration & options41
Vintage & configurations
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What objectives and stage motions are available on the Zygo MicroLUPI?
The Zygo MicroLUPI uses dovetail-mounted infinity-corrected SLWD objectives, including 50X with 0.45 NA and 13.80 mm working distance, and 100X with 0.73 NA and 4.70 mm working distance. The Zygo MicroLUPI has motorized Z-drive and X/Y stages with 6 in. (152 mm) range and 4 μin. (0.1 μm) resolution, and the X/Y stage has a maximum velocity of 0.50 in/sec (12.7 mm/sec).[1][4]
Not publicly documented
The following facts about the MicroLUPI are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MicroLUPI are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the MicroLUPI are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MicroLUPI are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MicroLUPI is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MicroLUPI are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]https://www.photonicmicrodevices.com/files/Zygo_Interferometer_MicroLUPI.pdf — photonicmicrodevices.comphotonicmicrodevices.com
- [3]lambdaphoto.co.uk — lambdaphoto.co.uklambdaphoto.co.uk
- [4]photonicmicrodevices.com — photonicmicrodevices.comphotonicmicrodevices.com
Last updated Oct 16, 2026.
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