Zygo

MicroLUPI

Precision Optics Zygo MicroLUPI family

Research Quality: 20% complete

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ZygoMicroLUPI

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What is it?

The Zygo MicroLUPI is an interferometer with a frequency-stabilized helium-neon laser and motorized Z and X/Y stages.

What do the numbers mean?

Optics & imaging5

Laser: Type: frequency stabilized Helium-Neon laser with fiber^[1]; optic output^[1]
Wavelength: 1550 nanometers^[1]; Objectives:^[1]
Resolution: 4 μin. (0.1 μm)^[1]

Configuration & options15

Maximum Output Power: <1 milliwatt^[1]
Output Power at Instrument Aperture: ≤1 milliwatt^[1]
Test Beam Diameter: 3 mm^[1]
Coherence Length: ≥10 meters^[1]
Mounting: Dovetail^[1]
Type: Infinity Corrected SLWD Mag. N.A. Working Dist.^[1]; 50X 0.45(1) 13.80 mm^[1]; 100X 0.73 4.70 mm^[1]; (1) 0.38 NA useable^[1]; Z-Drive (Focus) Stage:^[1]
Motor: DC brushless, microstepper^[1]
Drive: leadscrew^[1]
Range: 6 in. (152 mm)^[1]; X/Y Stage:^[1]
Maximum Velocity: 0.50 in/sec (12.7 mm/sec)^[1]

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Field notes

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Not publicly documented

The following facts about the MicroLUPI are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MicroLUPI are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MicroLUPI are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MicroLUPI are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MicroLUPI are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MicroLUPI is not on record.
Answerable by: an OEM datasheet or a fab qualification report