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AIX 2600 G 3 IC R Planetary Reactorversus0010-13622 RF Match for

Aixtron AIX 2600 G 3 IC R Planetary Reactor, Applied Materials 0010-13622 RF Match for, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMAixtronApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAixtron AIX 2600Applied Materials 0010-13622 RF Match for
Specifications
Phase3 Phase[1]—
Configuration4 Wire + Ground[1]High Efficiency HE RF Match-Bias[3]
ManufacturerAixtron[2]—
ModelAIX 2600 G 3 IC R[2]0010-13622[3]
CategoryDeposition[2]—
Electrical configuration3-phase, 4-wire + ground[2]—
Line frequency50/60 Hz[2]—
Vintage2007[2]—
Product familyAixtron AIX 2600 family[2]—
Electrical phase3 phase[2]—
Product Type—RF Match for PVD (Physical Vapor Deposition)[3]
Feature—High Efficiency HE RF Match-Bias[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing