Comparison ledger
Applied Materials 0010-03254 E Chuck, Applied Materials 9500 XR Wheel Cart, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | 9500 XR Wheel CartApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Applied Materials PI 9500 |
| Specifications | ||
| Configuration | — | 6"[1] |
| Size | — | 6 inch[2] |
| Manufacturer | — | Applied Materials[3] |
| Model | — | 9500 XR[3] |
| Category | — | Ion Implantation[3] |
| Wafer size | — | 8 inch[3] |
| Power | — | 208 V[3] |
| Voltage | — | 60 kV[3] |
| Frequency | — | 50/60 Hz[3] |
| Phase | — | 3 phase + Neurtal[3] |
| Chamber | — | CT 10 Cryos[3] |
| Gas Box | — | BF3, PH3, AsH3[3] |
| Software | — | 4.09[3] |
| Vintage | — | 1997[3] |
| Wafer on Gripper Sensor | — | Listed as a configuration/spec item[3] |
| Source Type | — | IHC[3] |
| Source Magnet | — | 5A[3] |
| Dual Extraction | — | Bellows, 60 kV, 160 kV max[3] |
| Post Acell Total Energy | — | 200 kV Max[3] |
| Plasma Flood Gun | — | Standard[3] |
| CPU | — | 162 031[3] |
| Circuit Breaker | — | 250 A[3] |
| Interrupt Capacity | — | 65000 A[3] |
| Vacuum | — | CT 10 Cryos[3] |
| Source Turbo | — | STP 1000 C[3] |
| Mrs Turbo | — | STP 400[3] |
| Source Backing | — | QDP 40[3] |
| Tilt | — | 0 to 7[3] |
| Wafer Loader | — | QDP 80[3] |
| Type | — | Wheel cart[2] |
| OEM | — | Applied Materials[2] |
| Product name | — | 9500 XR Wheel Cart[2] |
| Size designation | — | 6"[2] |
| Description | — | Wheel cart[1] |