Applied Materials

9500 XR Wheel Cart

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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Applied Materials 9500 XR Wheel Cart is a 6-inch wheel cart manufactured by Applied Materials.^[1]

9500 XR Wheel Cart — Inventory photo — Fig. 019500 XR Wheel CartInventory photo^[1]

Power

208 V^[3]

Vacuum

CT 10 Cryos^[3]

Gas delivery

BF3, PH3, AsH3^[3]

What is it?

The Applied Materials 9500 XR Wheel Cart is a 6-inch wheel cart manufactured by Applied Materials.

What do the numbers mean?

Power & electrical4

Power: 208 V^[3]
Voltage: 60 kV^[3]
Frequency: 50/60 Hz^[3]
Phase: 3 phase + Neurtal^[3]

Vacuum & pumping4

Chamber: CT 10 Cryos^[3]
Vacuum: CT 10 Cryos^[3]
Source Turbo: STP 1000 C^[3]
Mrs Turbo: STP 400^[3]

Wafer handling3

Wafer size: 8 inch^[3]
Wafer on Gripper Sensor: Listed as a configuration/spec item^[3]
Wafer Loader: QDP 80^[3]

Gas & chemistry1

Gas Box: BF3, PH3, AsH3^[3]

Control & software1

Software: 4.09^[3]

Configuration & options24

6"^[1]
Size: 6 inch^[2]
Manufacturer: Applied Materials^[3]
Model: 9500 XR^[3]
Category: Ion Implantation^[3]
Vintage: 1997^[3]
Source Type: IHC^[3]
Source Type: IHC Enlarged Chamber^[3]
Source Magnet: 5A^[3]
Dual Extraction: Bellows, 60 kV, 160 kV max^[3]
Post Acell Total Energy: 200 kV Max^[3]
Plasma Flood Gun: Standard^[3]
CPU: 162 031^[3]
Circuit Breaker: 250 A^[3]
Interrupt Capacity: 65000 A^[3]
Source Backing: QDP 40^[3]
Tilt: 0 to 7^[3]
Type: Wheel cart^[2]
OEM: Applied Materials^[2]
Product name: 9500 XR Wheel Cart^[2]
Size designation: 6"^[2]
Size designation: 6 inch^[2]
Description: Wheel cart^[1]
Size: 6 in^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power208 V^[3]
Voltage60 kV^[3]
Frequency50/60 Hz^[3]
Phase3 phase + Neurtal^[3]
ChamberCT 10 Cryos^[3]
Gas BoxBF3, PH3, AsH3^[3]
VacuumCT 10 Cryos^[3]
Source TurboSTP 1000 C^[3]
Mrs TurboSTP 400^[3]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the manufacturer and model of the 9500 XR Wheel Cart?

The manufacturer is Applied Materials and the model is 9500 XR.^[2]

What type of equipment is the Applied Materials 9500 XR Wheel Cart?

The Applied Materials 9500 XR Wheel Cart is a wheel cart.^[1]^[2]

Not publicly documented

The following facts about the 9500 XR Wheel Cart are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9500 XR Wheel Cart are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 9500 XR Wheel Cart are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 9500 XR Wheel Cart are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 9500 XR Wheel Cart are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 9500 XR Wheel Cart is not on record.
Answerable by: an OEM datasheet or a fab qualification report