Comparison ledger
Applied Materials 0010-03254 E Chuck, Axcelis Integra ES Plasma Dry Strip, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | Integra ES Plasma Dry StripAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Axcelis Integra ES Plasma Dry Strip |
| Specifications | ||
| Phase | — | 3 Phase[1] |
| Configuration | — | 50/60 Hz[1] |
| Manufacturer | — | Axcelis[2] |
| Model | — | Integra[2] |
| Description | — | ES Plasma Dry Strip System[2] |
| Version | — | 300 mm[3] |
| Power | — | 3 Phase[1] |
| Frequency | — | 50/60 Hz[1] |
| Current | — | 220 A[1] |
| Vintage | — | 2011[1] |