Waferpedia

Axcelis

Integra ES Plasma Dry Strip

Axcelis Integra ES Plasma Dry Strip family
Research Quality: 30% complete
Email

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Integra ES Plasma Dry Strip — Inventory photo
Fig. 01Integra ES Plasma Dry StripInventory photo[1]

What it is

The Axcelis Integra ES Plasma Dry Strip is a semiconductor process tool used for plasma dry stripping. The model is part of the Axcelis Integra family.[2][4]

What do the numbers mean?

Power & electrical4

Phase
3 Phase[1]
Accurate?
50/60 Hz[1]
Accurate?
Power
3 Phase[1]
Accurate?
Frequency
50/60 Hz[1]
Accurate?

Configuration & options7

220 A[1]
Accurate?
Manufacturer
Axcelis[2]
Accurate?
Model
Integra[2]
Accurate?
Description
ES Plasma Dry Strip System[2]
Accurate?
Version
300 mm[3]
Accurate?
Current
220 A[1]
Accurate?
Vintage
2011[1]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • Configuration50/60 Hz[1]
  • Power3 Phase[1]
  • Frequency50/60 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What type of tool is the Axcelis Integra ES Plasma Dry Strip?

The Axcelis Integra ES Plasma Dry Strip is a semiconductor plasma dry strip system.[2][5]

What family does this tool belong to?

The Axcelis Integra ES Plasma Dry Strip belongs to the Axcelis Integra family.[4]

Not publicly documented

The following facts about the Integra ES Plasma Dry Strip are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Integra ES Plasma Dry Strip are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Integra ES Plasma Dry Strip are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Integra ES Plasma Dry Strip are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Integra ES Plasma Dry Strip are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Integra ES Plasma Dry Strip is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Equipment inventory listing
  3. [3]fabsurplus.comfabsurplus.com
  4. [4]Axcelis Integra ES Plasma Dry Strip family | Waferpedia — waferpedia.comwaferpedia.com
  5. [5]Integra ES Plasma Dry Strip — Axcelis | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Was this page accurate?

Last updated Oct 11, 2026.

Compare with similar tools

View all →