Comparison ledger
Applied Materials 0010-03254 E Chuck, CHA Mps-4, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | Mps-4CHA |
|---|---|---|
| OEM | Applied Materials | CHA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | CHA Mps-4 |
| Specifications | ||
| Model listing | — | CHA Mps-4 System[1] |
| Operation | — | Side sputtering operation[2] |
| Cathodes | — | Up to four DC or RF cathodes[2] |
| Substrate heating | — | 360° substrate heating[2] |
| Shutters | — | Rotating shutters for positive thickness cutoff control[2] |
| Fixturing | — | Dual drive planetary[2] |