CHA
Mps-4
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The CHA Mps-4 is a system in the CHA Industries systems lineup. The MPS-4 is designed for side sputtering operation with up to four DC or RF cathodes.[1][2]
How it works
The MPS-4 is designed for side sputtering operation with up to four DC or RF cathodes. The MPS-4 features substrate heating through a full circle and rotating shutters for thickness cutoff control. Standard system fixturing consists of a dual drive planetary. The orbit drive allows substrates to pass through the deposition zone or to be stopped in front of or near any cathode while the substrate spins on its own axis.[2]
What do the numbers mean?
Power & electrical1
Wafer handling1
Control & software1
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- CathodesUp to four DC or RF cathodes[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Mps-4 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mps-4 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Mps-4 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Mps-4 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Mps-4 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Mps-4 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]semiconductoronline.com — semiconductoronline.comsemiconductoronline.com
- [3]Mps-4 — CHA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 19, 2026.