Comparison ledger
Applied Materials 0010-03254 E Chuck, Edwards IQDP 80 Dry Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | IQDP 80 Dry VacuumEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Edwards IQDP 80 |
| Specifications | ||
| Configuration | — | Refurbished[1] |
| Phase | — | 3 Phase[2] |
| Frequency | — | 60 Hz[2] |
| Voltage | — | 480 V[2] |
| Type | — | Dry Vacuum Pump[4] |
| Manufacturer | — | Edwards[4] |
| Model | — | IQDP 80[4] |
| System description | — | Semiconductor pumping system[5] |
| Typical peak pumping speed at 60 Hz | — | 96 m3/h-1[5] |
| Maximum continuous inlet pressure | — | 1x10*5 Pa[5] |
| Inlet connection | — | ISO 63[5] |
| Outlet connection | — | NW 40[5] |
| Condition | — | Rebuilt[6] |
| Part number | — | A53280905[6] |
| Inlet | — | ISO63 bolted[6] |
| Exhaust | — | KF40[6] |
| Motor | — | 3 Phase, 200-460V, 50/60Hz[6] |
| Pumping speed | — | 56.5 CFM (60Hz)[6] |
| Ultimate vacuum | — | 7.5 x 10-3 Torr (60Hz)[6] |
| Weight | — | 477 lbs[6] |