Edwards
IQDP 80 Dry Vacuum
The Edwards IQDP 80 is a dry vacuum pump.[1]
How it works
The Edwards IQDP 80 is a four-stage positive displacement dry pump. The Edwards IQDP 80 uses pairs of intermeshing rotors with different profiles mounted on common shafts. The Edwards IQDP 80 keeps the rotors in phase with a pair of timing gears. The Edwards IQDP 80 operates from atmospheric pressure down to ultimate vacuum without lubricating or sealing fluid in the pumping chambers. The Edwards IQDP 80 has enclosed water-cooled motors. The Edwards IQDP 80 has an indirect cooling system, and the pump motor is water cooled. The Edwards IQDP 80 system has a gas module that introduces purge gas into the pump. The Edwards IQDP 80 can be manually controlled through an optional Pump Display Module accessory. The Edwards IQDP 80 can also be controlled through an Interface Module accessory or through an iQSingle Pumpset Monitor accessory.[9][7]
What do the numbers mean?
Power & electrical6
Vacuum & pumping8
- With QMB 250 vacuum booster[7]
Dimensions & facilities1
Configuration & options8
- Refurbished[4]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Phase3 Phase[5]
- Frequency60 Hz[5]
- Voltage480 V[5]
- Voltage208V[6]
- TypeDry Vacuum Pump[1]
- ConfigurationWith QMB 250 vacuum booster[7]
- System descriptionSemiconductor pumping system[7]
- Typical peak pumping speed at 60 Hz96 m3/h-1[7]
- Maximum continuous inlet pressure1x10*5 Pa[7]
- TypeDry pump[8]
- ExhaustKF40[8]
- Motor3 Phase, 200-460V, 50/60Hz[8]
- Pumping speed56.5 CFM (60Hz)[8]
- Ultimate vacuum7.5 x 10-3 Torr (60Hz)[8]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the IQDP 80 Dry Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IQDP 80 Dry Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the IQDP 80 Dry Vacuum are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the IQDP 80 Dry Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IQDP 80 Dry Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the IQDP 80 Dry Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (10)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]inventory listing
- [6]inventory listing
- [7]ajvs.com — ajvs.comajvs.com
- [8]provac.comprovac.com
- [9]Fully Refurbished Edwards Vacuum IQDP 80 Dry Vacuum Pump, Semiconductor Pump, A53280905 — ajvs.comajvs.com
- [10]Equipment inventory listing
Last updated Oct 20, 2026.