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0010-03254 E ChuckversusQDP 40

Applied Materials 0010-03254 E Chuck, Edwards QDP 40, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
QDP 40Edwards
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Edwards QDP 40
Cited variants—
  • QDP40 Drystar Pump[1]
Specifications
Qty—3[2]
Configuration—(2) working condition[2]
Model—QDP 40[2]
Manufacturer—Edwards[2]
Type of product—dry pump[3]
Inlet connection—ISO40[1]
Outlet connection—NW40[1]
Motor rating—2.2 kW[1]
Mass—172 kg[1]
Warm-up time to nominal performance—15 min[1]
Ambient operating temperature range—5 to 40 °C[1]
Protection degree—IP44[1]
Continuous A-weighted sound pressure level (at 1 meter)—< 70 dB(A)[1]
Typical peak pumping speed, 50 Hz—44 m3/h[1]
Typical peak pumping speed, 60 Hz—55 m3/h[1]
Typical ultimate vacuum without gas-ballast, 50 Hz—5 x 10-2 mbar[1]
Typical ultimate vacuum without gas-ballast, 60 Hz—3 x 10-2 mbar[1]
Electrical supply—200-208/380-415 V at 50 Hz, 3-phase; 200-230/460 V at 60 Hz, 3-phase[1]
Cooling-water maximum supply pressure—100 psi (6.9 bar absolute)[1]
Cooling-water minimum required pressure differential across supply and return—30 psi (2.1 x 10^5 Pa)[1]
Cooling-water typical heat removed from pump—1.75 kW[1]
Cooling-water maximum particle size in supply—0.03 mm[1]
Nitrogen supply fittings type—1/4 inch compression[1]
Pump operating temperature at thermal snap-switch position—55 °C, 70 °C, 90 °C[1]
Sources (3)Every fact above is drawn from these public sources
  1. [1]docs.chemtechsci.comdocs.chemtechsci.com
  2. [2]inventory listing
  3. [3]provac.comprovac.com