Edwards
QDP 40
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Edwards QDP 40 is a dry vacuum pump. The Edwards QDP 40 has an enclosed, water-cooled motor. The Edwards QDP 40 has an ISO40 inlet connection and an NW40 outlet connection.[1]
How it works
The QDP 40 is a four-stage positive displacement rotary pump. The QDP 40 uses pairs of intermeshing rotors of different profiles mounted on common shafts. The QDP 40 holds the rotors in the correct phase relation with a pair of timing gears. The timing gears and adjacent double-row angular contact ball bearings are oil lubricated. The pump shafts and rotors are made from cast iron. The internal and external shaft seals on the motor drive shaft are made of polytetrafluoroethylene. The bearings near the pump inlet are packed with perfluoropolyether grease.[5][1]
The QDP 40 has a gas system with stainless steel pipelines that allows nitrogen delivery to inlet purge, shaft seal purge, interstage purge points, and exhaust purge. The QDP 40 uses indirect cooling on the low vacuum stage, while other stages are air cooled by natural convection and radiation. The QDP 40 uses a thermostatic control valve to maintain constant pump temperature by controlling cooling water to the primary circuit. The pump motor is cooled by water flowing through a cooling jacket, and the motor cooling circuit is separate from the pump cooling circuit.[1]
Applications
The QDP 40 is used in semiconductor processing. The QDP 40 is used for freeze drying, vacuum deposition, research and development, sputtering, load lock chambers, vacuum furnaces, chemical processes, ion implanters, plasma etch, and LPCVD.[4]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- One unit has a switch not in good order.
What do the numbers mean?
Power & electrical7
Vacuum & pumping5
- Cooling-water minimum required pressure differential across supply and return
- 30 psi (2.1 x 10^5 Pa)[1]
Dimensions & facilities1
Configuration & options12
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| QDP40 Drystar Pump | — | — | — | docs.chemtechsci.com[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Type of productdry pump[4]
- Motor rating2.2 kW[1]
- Continuous A-weighted sound pressure level (at 1 meter)< 70 dB(A)[1]
- Typical peak pumping speed, 50 Hz44 m3/h[1]
- Typical peak pumping speed, 60 Hz55 m3/h[1]
- Typical ultimate vacuum without gas-ballast, 50 Hz5 x 10-2 mbar[1]
- Typical ultimate vacuum without gas-ballast, 60 Hz3 x 10-2 mbar[1]
- Electrical supply200-208/380-415 V at 50 Hz, 3-phase; 200-230/460 V at 60 Hz, 3-phase[1]
- Cooling-water maximum supply pressure100 psi (6.9 bar absolute)[1]
- Cooling-water minimum required pressure differential across supply and return30 psi (2.1 x 10^5 Pa)[1]
- Cooling-water typical heat removed from pump1.75 kW[1]
- Pump operating temperature at thermal snap-switch position55 °C, 70 °C, 90 °C[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Is the Edwards QDP 40 a dry pump?
The Edwards QDP 40 is a dry vacuum pump. The QDP 40 operates without lubricating or sealing fluid in the pumping chamber.[4][5][1]
Not publicly documented
The following facts about the QDP 40 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the QDP 40 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the QDP 40 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the QDP 40 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the QDP 40 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the QDP 40 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]docs.chemtechsci.com — docs.chemtechsci.comdocs.chemtechsci.com
- [2]Inventory photo
- [3]Inventory photo
- [4]provac.com — provac.comprovac.com
- [5]Edwards QDP-40 (QDP 40) (QDP40) Dry Vacuum Pump, qdp40, Edwards QDP40 Dry Vacuum Pump, 200-208 50/60 Hz / 380-415 50/ Hz — ajvs.comajvs.com
- [6]Ideal Vacuum | Edwards QDP40 iQDP40 Semiconductor Vacuum Pump Motor Water Cooled, 2.2 kW D9OI C, A07113770 A07113770PP — idealvac.comidealvac.com
Last updated Oct 19, 2026.