Comparison ledger
Applied Materials 0010-03254 E Chuck, Edwards QDP 80, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | QDP 80Edwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Edwards QDP 80 |
| Cited variants | — | |
| Specifications | ||
| Qty | — | 2[2] |
| Configuration | — | (1) in good order[2] |
| Type | — | Dry Pump[3] |
| Pump type | — | four-stage, positive displacement rotary pump[1] |
| Inlet connection | — | ISO63[4] |
| Inlet connections | — | ISO63[1] |
| Outlet connection | — | NW40[4] |
| Outlet connections | — | NW40[1] |
| Motor rating | — | 4 kW/6 kW[1] |
| Warm-up time to nominal performance | — | 15 min[1] |
| Typical peak pumping speed | — | 80 m3h-1 at 50 Hz; 96 m3h-1 at 60 Hz[1] |
| Typical ultimate vacuum without gas-ballast | — | 3 x 10-2 mbar at 50 Hz; 3 x 10-2 mbar at 60 Hz[1] |
| Mass | — | 202 kg[1] |
| Weight | — | 202 Kg[5] |
| Exhaust | — | KF40[5] |
| Supply voltage | — | 200-208/380-415 V at 50 Hz, 3-phase; 200-230/460 V at 60 Hz, 3-phase[1] |
| Protection degree | — | IP44[1] |
| Continuous A-weighted sound pressure level (at 1 meter) | — | < 70 dB(A)[1] |
| Warm-up time | — | 15 min[5] |
| Pumping speed | — | 47 CFM (50Hz)[5] |
| Ultimate pressure | — | 2.3 x 10-2 Torr (50Hz)[5] |
| Noise level measured at 1 m from the pump | — | < 70 dB(A)[5] |
| Ultimate vacuum | — | 2.25 x 10-2 Torr (without gas ballast)[4] |