Edwards
QDP 80
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Edwards QDP 80 is a dry pump. The Edwards QDP 80 is a four-stage, positive displacement rotary pump. The Edwards QDP 80 has an ISO63 inlet connection and an NW40 outlet connection.[1]
How it works
The QDP pumps operate between atmospheric pressure and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. The QDP pumps are four-stage positive displacement rotary pumps. The QDP pumps use pairs of intermeshing rotors mounted on common shafts. The rotors are kept in phase by timing gears. The timing gears and adjacent angular contact ball bearings are oil lubricated. The high vacuum end bearings are packed with perfluoropolyether grease. The QDP pumps are fitted with a gas system, an exhaust silencer, and a check valve.[1]
What do the numbers mean?
Power & electrical4
- Typical ultimate vacuum without gas-ballast
- 3 x 10-2 mbar at 50 Hz; 3 x 10-2 mbar at 60 Hz[1]
Vacuum & pumping9
Dimensions & facilities2
Configuration & options10
Vintage & configurations
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- TypeDry Pump[3]
- Pump typefour-stage, positive displacement rotary pump[1]
- Motor rating4 kW/6 kW[1]
- Typical peak pumping speed80 m3h-1 at 50 Hz; 96 m3h-1 at 60 Hz[1]
- Typical ultimate vacuum without gas-ballast3 x 10-2 mbar at 50 Hz; 3 x 10-2 mbar at 60 Hz[1]
- ExhaustKF40[5]
- Supply voltage200-208/380-415 V at 50 Hz, 3-phase; 200-230/460 V at 60 Hz, 3-phase[1]
- Continuous A-weighted sound pressure level (at 1 meter)< 70 dB(A)[1]
- Pumping speed47 CFM (50Hz)[5]
- Ultimate pressure2.3 x 10-2 Torr (50Hz)[5]
- Noise level measured at 1 m from the pump< 70 dB(A)[5]
- Pumping speed64.6 CFM (60Hz)[4]
- Ultimate vacuum2.25 x 10-2 Torr (without gas ballast)[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What pumping principle does the QDP family use?
The QDP pumps are four-stage positive displacement rotary pumps. The QDP pumps use pairs of intermeshing rotors on common shafts, and timing gears keep the rotors in phase.[1]
Not publicly documented
The following facts about the QDP 80 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the QDP 80 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the QDP 80 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the QDP 80 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the QDP 80 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the QDP 80 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]docs.chemtechsci.com — docs.chemtechsci.comdocs.chemtechsci.com
- [2]Inventory photo
- [3]waferpedia.comwaferpedia.com
- [4]provac.com — provac.comprovac.com
- [5]ecjent.comecjent.com
Last updated Oct 19, 2026.