Comparison ledger
Applied Materials 0010-03254 E Chuck, Edwards XDS-5, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | XDS-5Edwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Edwards XDS-5 |
| Specifications | ||
| OEM | — | Edwards[1] |
| Referenced pump model | — | XDS-5[1] |
| Manufacturer information document | — | Edwards XDS-5 pump manual[2] |
| Product type | — | Dry vacuum pump[2] |
| Maximum displacement at 50 Hz | — | 5.7 m3/hr[2] |
| Maximum displacement at 60 Hz | — | 6.7 m3/hr[2] |
| Maximum pumping speed at 50 Hz | — | 4.8 m3/hr[2] |
| Maximum pumping speed at 60 Hz | — | 6.0 m3/hr[2] |
| Maximum permitted inlet pressure and gas-ballast inlet pressure | — | 0.5 bar gauge[2] |
| Maximum permitted outlet pressure | — | 1 bar gauge[2] |
| Inlet/outlet connection | — | DN25NW[2] |
| Mass | — | 23 kg[2] |
| Sound pressure at ultimate vacuum | — | 55 dB(A) at 1 m[2] |
| Vibration at inlet port | — | <4.5 mm/s rms[2] |