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Edwards

XDS-5

Edwards XDS-5 family
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The Edwards XDS-5 is a dry vacuum pump. The Edwards XDS-5 is suitable for vapour-handling processes. The Edwards XDS-5 has a maximum displacement of 5.7 m3/hr at 50 Hz and 6.7 m3/hr at 60 Hz.[1]

EdwardsXDS-5
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Power

5.7 m3/hr[1]

Vacuum

XDS-5[2]

What it is

The Edwards XDS-5 is a dry pump in the XDS series. The instruction manual covers the XDS5 and XDS10 models. The pump type code uses the digit 4 for XDS5 and the digit 6 for XDS10 within the A72X-YY-ZZZ designation.[1][3]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • A fine dust may be emitted from the exhaust during start up, particularly when the pump is new or if new tip seals are fitted.
  • If the exhaust line pressure is raised, tip seal wear accelerates and pumping performance can be reduced.
  • The pump has failed to start can be caused by electrical supply, motor configuration, motor fault, or thermal overload.
  • The pump has failed to achieve the required performance can be caused by leaks, blocked inlet strainer, blocked exhaust line, incorrect gas-ballast setting, worn tip seals, or out-of-range operating conditions.
  • The pump is noisy can be caused by worn bearings or solid particle contamination.
  • The pump surface temperature above 100 °C can be caused by high ambient temperature, insufficient or too-hot cooling air, high supply voltage, hot process gas, or fan failure.
  • The pumping speed is poor can be caused by undersized or too-long pipelines, a blocked inlet strainer, or a blocked exhaust line.

What do the numbers mean?

Power & electrical4

Maximum displacement at 50 Hz
5.7 m3/hr[1]
Accurate?
Maximum displacement at 60 Hz
6.7 m3/hr[1]
Accurate?
Maximum pumping speed at 50 Hz
4.8 m3/hr[1]
Accurate?
Maximum pumping speed at 60 Hz
6.0 m3/hr[1]
Accurate?

Vacuum & pumping6

Referenced pump model
XDS-5[2]
Accurate?
Manufacturer information document
Edwards XDS-5 pump manual[1]
Accurate?
Product type
Dry vacuum pump[1]
Accurate?
Maximum permitted inlet pressure and gas-ballast inlet pressure
0.5 bar gauge[1]
Accurate?
Maximum permitted outlet pressure
1 bar gauge[1]
Accurate?
Sound pressure at ultimate vacuum
55 dB(A) at 1 m[1]
Accurate?

Dimensions & facilities1

Mass
23 kg[1]
Accurate?

Configuration & options3

OEM
Edwards[2]
Accurate?
Inlet/outlet connection
DN25NW[1]
Accurate?
Vibration at inlet port
<4.5 mm/s rms[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Referenced pump modelXDS-5[2]
  • Manufacturer information documentEdwards XDS-5 pump manual[1]
  • Product typeDry vacuum pump[1]
  • Maximum displacement at 50 Hz5.7 m3/hr[1]
  • Maximum displacement at 60 Hz6.7 m3/hr[1]
  • Maximum pumping speed at 50 Hz4.8 m3/hr[1]
  • Maximum pumping speed at 60 Hz6.0 m3/hr[1]
  • Maximum permitted inlet pressure and gas-ballast inlet pressure0.5 bar gauge[1]
  • Maximum permitted outlet pressure1 bar gauge[1]
  • Sound pressure at ultimate vacuum55 dB(A) at 1 m[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of pump is the Edwards XDS-5?

The Edwards XDS-5 is a dry pump in the XDS Dry Pump family.[1][3]

What inlet connection does the XDS-5 use?

The single-phase XDS dry pump uses an NW25 inlet port.[3]

Does the XDS-5 have gas ballast control?

The XDS-5 has a gas-ballast control with closed, low-flow, and high-flow positions.[3]

How is the XDS-5 cooled?

The XDS-5 is air-cooled by a fan mounted at the opposite end to the motor.[3]

Not publicly documented

The following facts about the XDS-5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XDS-5 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the XDS-5 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the XDS-5 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the XDS-5 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the XDS-5 are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
  2. [2]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
  3. [3]https://www.idealvac.com/files/ManualsII/Edwards_XDS10_XDS5_Dry_scroll_Vacuum_Pump_Users_Manual.pdf — idealvac.comidealvac.com
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Last updated Oct 17, 2026.

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