Edwards
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Edwards XDS-5 is a dry vacuum pump. The Edwards XDS-5 is suitable for vapour-handling processes. The Edwards XDS-5 has a maximum displacement of 5.7 m3/hr at 50 Hz and 6.7 m3/hr at 60 Hz.[1]
Plate 01Edwards XDS-5 XD5 S Oil-Free Dry Scroll Vacuum Pump
Plate 02Edwards Vacuum Pump XDS5 and XDS10 Tip Seal Change
Plate 03BOC Edwards XDS5 XDS-5 Oil-Free Dry Scroll Vacuum Pump 115v 3.5 CFM 0.05 torr
Plate 04Edwards XDS5 Dry Scroll Vacuum Pump A724-01-904, Single Phase, 110V & 220V, Oli-Free, Working
Plate 05Edwards XDS5 and XDS10 Tip Seal Change
Plate 06Edwards XDS5 Dry Scroll Vacuum Pump A724-01-904 Single Phase 110V & 220V Working
Documented failure modes, common issues, and field considerations.
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The Edwards XDS-5 is a dry pump in the XDS Dry Pump family.[1][3]
The single-phase XDS dry pump uses an NW25 inlet port.[3]
The XDS-5 has a gas-ballast control with closed, low-flow, and high-flow positions.[3]
The XDS-5 is air-cooled by a fan mounted at the opposite end to the motor.[3]
The following facts about the XDS-5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XDS-5 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the XDS-5 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the XDS-5 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the XDS-5 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the XDS-5 are on record.
Answerable by: an OEM parts catalog or a service engineer
Last updated Oct 17, 2026.