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0010-03254 E ChuckversusAlliance A 6 9400 DSIE III Process

Applied Materials 0010-03254 E Chuck, Lam Research Alliance A 6 9400 DSIE III Process, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsLam Research
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2015 Refurbishment
Control system——
Generation——
Family—Lam Research Alliance
Specifications
Configuration—50/60 Hz[1]
Voltage—208Vac[1]
Full Load Current—43 amps[1]
Phase—3 Phase[1]
OEM—Lam[1]
Model—Alliance A 6 9400 DSIE III[1]
Equipment type—Process Chamber[1]
Wafer size—8 inch[1]
Power—208Vac[1]
Electrical phase—3 Phase[1]
Frequency—50/60 Hz[1]
Electrical connection—4 Wire + Protective GND[1]
Vintage—2008[1]
Refurbishment—Refurbished by Lam in 2015[1]
Make—Lam[1]
Input voltage—208Vac[1]
Electrical configuration—4 Wire + Protective GND[1]
Refurbishment note—Refurbished by Lam in 2015[1]
Last confirmed date—August 22, 2024[2]
Electrical—50/60 Hz, 208Vac, 4 Wire + Protective GND, 3 Phase[1]
Last confirm date—August 22, 2024[2]
Wiring—4 Wire + Protective GND[1]
Vintage (Manufacture Year)—2008[1]
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing