Lam Research
Alliance A 6 9400 DSIE III Process
What it is
What do the numbers mean?
Vintage & configurations
- 2015Refurbishment[1]
Refurbished by Lam in 2015.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configuration50/60 Hz[1]
- Voltage208Vac[1]
- Full Load Current43 amps[1]
- Phase3 Phase[1]
- Electrical phase3 Phase[1]
- Frequency50/60 Hz[1]
- Electrical connection4 Wire + Protective GND[1]
- Power50/60 Hz[1]
- Input voltage208Vac[1]
- Electrical configuration4 Wire + Protective GND[1]
- Electrical50/60 Hz, 208Vac, 4 Wire + Protective GND, 3 Phase[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Alliance A 6 9400 DSIE III Process are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the Alliance A 6 9400 DSIE III Process are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alliance A 6 9400 DSIE III Process are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alliance A 6 9400 DSIE III Process are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Alliance A 6 9400 DSIE III Process is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Alliance A 6 9400 DSIE III Process are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Equipment inventory listing
Last updated Oct 17, 2026.
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