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0010-03254 E ChuckversusAFT 4000 Film Thickness Measurement

Applied Materials 0010-03254 E Chuck, Onto Innovation AFT 4000 Film Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsOnto Innovation
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Onto Innovation AFT 4000 Film Thickness Measurement
Specifications
Wavelength Range—Visible 400-900[1]
Configuration—nm[1]
Wafer diameter(s)—100 mm, 150 mm[3]
Wafer holder—delrin[3]
Wafer materials—silicon[3]
Wafer thickness—200 .. 1000 µm[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]mems-exchange.orgmems-exchange.org