Onto Innovation

AFT 4000 Film Thickness Measurement

Onto Innovation AFT 4000 Film Thickness Measurement family

Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

AFT 4000 Film Thickness Measurement — Inventory photo — Fig. 01AFT 4000 Film Thickness MeasurementInventory photo^[1]

What it is

The Onto Innovation AFT 4000 is a film thickness measurement system. The AFT 4000 has a visible wavelength range of 400-900 nm. The AFT 4000 supports mapping, contour, 2D, and 3D color output.^[1]^[2]^[4]

What do the numbers mean?

Wafer handling4

Wafer diameter(s): 100 mm, 150 mm^[3]
Wafer holder: delrin^[3]
Wafer materials: silicon^[3]
Wafer thickness: 200 .. 1000 µm^[3]

Optics & imaging3

Wavelength Range: Visible 400-900^[1]; nm^[1]
Wavelength Range: Visible 400-900 nm^[2]

Configuration & options1

Mapping, Contour, 2D and 3D Color^[1]

Accurate?

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What kind of tool is the AFT 4000?

The AFT 4000 is a film thickness measurement system.^[1]^[2]^[4]

What wavelength range is given for the AFT 4000?

The AFT 4000 has a visible wavelength range of 400-900 nm.^[1]^[2]^[4]

Not publicly documented

The following facts about the AFT 4000 Film Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AFT 4000 Film Thickness Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AFT 4000 Film Thickness Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AFT 4000 Film Thickness Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AFT 4000 Film Thickness Measurement are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AFT 4000 Film Thickness Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources

[1]Inventory photo
[2]waferpedia.com — waferpedia.comwaferpedia.com
[3]mems-exchange.orgmems-exchange.org
[4]Onto Innovation AFT 4000 Film Thickness Measurement family | Waferpedia — waferpedia.comwaferpedia.com