Comparison ledger
Applied Materials 0010-03254 E Chuck, Pfeiffer Alcatel ATH 2300 M Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | Alcatel ATH 2300 M TurboPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Pfeiffer Alcatel |
| Specifications | ||
| Configuration | — | With ACT 1300 M Turbo Pump Controller/Drive[1] |
| Manufacturer | — | Pfeiffer / Alcatel[1] |
| Model | — | ATH 2300 M[1] |
| Type of product | — | turbo pump[2] |
| Part number | — | Q66621A1[2] |
| Inlet | — | ISO250F[2] |
| Exhaust | — | KF40[2] |
| Pumping speed | — | 2,100 l/s (N2)[2] |
| Compression ratio | — | > 10^9 (N2)[2] |
| Ultimate pressure | — | 3 x 10-9 Torr[2] |
| Weight | — | 102 lbs[2] |
| Recommended controller | — | ACT-2300M[2] |
| Recommended backing pump | — | ADP • ADS[2] |
| Controller/drive | — | ACT 1300 M Turbo Pump Controller/Drive[3] |