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Pfeiffer

Alcatel ATH 2300 M Turbo

Pfeiffer Alcatel family
Research Quality: 30% complete
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Alcatel ATH 2300 M Turbo — Inventory photo
Fig. 01Alcatel ATH 2300 M TurboInventory photo[1]

What is it?

The Pfeiffer Alcatel ATH 2300 M Turbo is a turbo pump.

What do the numbers mean?

Vacuum & pumping7

With ACT 1300 M Turbo Pump Controller/Drive[2]
Accurate?
Type of product
turbo pump[3]2 sources
Accurate?
Exhaust
KF40[3]2 sources
Accurate?
Pumping speed
2,100 l/s (N2)[3]2 sources
Accurate?
Ultimate pressure
3 x 10-9 Torr[3]2 sources
Accurate?
Recommended backing pump
ADP • ADS[3]2 sources
Accurate?
Controller/drive
ACT 1300 M Turbo Pump Controller/Drive[1]
Accurate?

Control & software1

Recommended controller
ACT-2300M[3]2 sources
Accurate?

Dimensions & facilities1

Weight
102 lbs[3]2 sources
Accurate?

Configuration & options5

Manufacturer
Pfeiffer / Alcatel[2]
Accurate?
Model
ATH 2300 M[2]
Accurate?
Part number
Q66621A1[3]2 sources
Accurate?
Inlet
ISO250F[3]2 sources
Accurate?
Compression ratio
> 10^9 (N2)[3]2 sources
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationWith ACT 1300 M Turbo Pump Controller/Drive[2]
  • Type of productturbo pump[3]
  • ExhaustKF40[3]
  • Pumping speed2,100 l/s (N2)[3]
  • Ultimate pressure3 x 10-9 Torr[3]
  • Recommended backing pumpADP • ADS[3]
  • Controller/driveACT 1300 M Turbo Pump Controller/Drive[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What kind of equipment is the ATH 2300 M Turbo?

The ATH 2300 M Turbo is a turbo pump.[2][1]

Not publicly documented

The following facts about the Alcatel ATH 2300 M Turbo are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alcatel ATH 2300 M Turbo are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Alcatel ATH 2300 M Turbo are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Alcatel ATH 2300 M Turbo are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Alcatel ATH 2300 M Turbo are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Alcatel ATH 2300 M Turbo is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]provac.comprovac.com
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Last updated Oct 19, 2026.

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