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Comparison ledger

0010-03254 E Chuckversus90 Coater Developer Track

Applied Materials 0010-03254 E Chuck, SVG 90 Coater Developer Track, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsSVG
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—SVG 90 Coater Developer Track
Specifications
Configuration—With:[1]
OEM—SVG[1]
Model—90 Coater / Developer Track[1]
Equipment type—Coater / Developer Track[2]
Wafer size—200mm[2]
Version—200mm[3]
Wafer handling—Sensor, Cassette[2]
Control & software—SVG GUI Rack Controller Cabinet; Shuttle Interface Board 99-80267-01r[2]
Gas & chemistry—SVG Chemical Cabinet; Chemical Waste Tank[2]
Voltage—24 VDC Solenoid 114-1003[1]
Power—24 VDC Solenoid 114-1003[2]
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]fabsurplus.comfabsurplus.com